The invention discloses a production method for a flexible electrostatic drive MEMS relay based on polyimide and belongs to the technical field of micro electro mechanical system micromachining. Materials of a substrate and a movable structure of the produced MEMS relay are flexible polymer polyimide. The polyimide substrate can be peeled off from a silicon wafer, so the flexibility of the relay is realized really. According to the method, through adoption of technologies such as thermal oxidation, magnetron sputtering, photoetching, chemical corrosion, plasma enhanced chemical vapor deposition, and sacrificial layer removal, the structure of the MEMS relay is realized. The MEMS relay produced by the method is flexible and can be applied to the field of flexible electronics.