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发明公开
CN108695225A 静电吸盘 无效 - 驳回

静电吸盘
摘要：
本发明涉及一种静电吸盘，主要包括底座、陶瓷体及层叠体，层叠体位于底座及陶瓷体之间，层叠体包括密封结构及加热结构等，密封结构环绕加热结构，并且，密封结构靠近底座一侧的面积较靠近陶瓷体一侧的面积大。本发明的密封结构可增加其有效刻蚀面积，延长静电吸盘内部抵抗等离子体轰击的时间，从而延长静电吸盘的使用寿命。
摘要（英）：

The invention relates to an electrostatic chuck mainly comprising a pedestal, a ceramic body and a laminated body. The laminated body arranged between the pedestal and the ceramic body consists of a sealing structure and a heating structure and the like; the sealing structure encircles the heating structure; and the area of one side, approaching the pedestal, of the sealing structure is larger than the area of one side, approaching the ceramic body, of the sealing structure. With the sealing structure, the effective etching area is increased and the time of resisting plasma bombardment insidethe electrostatic chuck is prolonged, so that the service life of the electrostatic chuck is prolonged.

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