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发明授权
CN108695347B 用于串扰减少的像素阵列和高动态范围图像传感器阵列 有权

用于串扰减少的像素阵列和高动态范围图像传感器阵列
摘要：
本发明涉及高动态范围图像传感器的串扰减少。多色彩HDR图像传感器至少包含具有第一彩色滤光器的第一组合色彩像素以及具有不同于所述第一彩色滤光器的第二彩色滤光器的邻近第二组合色彩像素，其中每一组合色彩像素包含具有至少两个邻近光电二极管的至少两个子像素。在每一组合色彩像素内，存在用以将具有相同彩色滤光器的两个邻近子像素的两个邻近光电二极管隔离的介电深沟槽隔离d‑DTI结构以便防止电串扰。在具有不同彩色滤光器的两个邻近组合色彩像素之间，存在用以将具有不同彩色滤光器的两个邻近子像素的两个邻近光电二极管隔离的混合深沟槽隔离h‑DTI结构以便防止光学串扰及电串扰两者。每一组合色彩像素在所有侧上由所述混合深沟槽隔离h‑DTI结构围封。
摘要（英）：

A multi-color HDR image sensor includes at least a first combination color pixel with a first color filter and an adjacent second combination color pixel with a second color filter which is different from the first color filter, wherein each combination color pixel includes at least two sub-pixels having at least two adjacent photodiodes. Within each combination color pixel, there is a dielectric deep trench isolation (d-DTI) structure to isolate the two adjacent photodiodes of the two adjacent sub-pixels with same color filters in order to prevent the electrical cross talk. Between two adjacent combination color pixels with different color filters, there is a hybrid deep trench isolation (h-DTI) structure to isolate two adjacent photodiodes of two adjacent sub-pixels with different color filters in order to prevent both optical and electrical cross talk. Each combination color pixel is enclosed on all sides by the hybrid deep trench isolation (h-DTI) structure.

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