The invention relates to a precise grinding processing method for an aspheric array structure. A machine tool which is in linkage with an X-axis, a Y-axis, a Z-axis and a C-axis fourth axis are used for processing, the workpiece is installed on a C axis of the machine tool main shaft for controllable rotary motion, simple harmonic motion of phase difference Pi/2 in X-axis and Y-axis directions along with rotation of C-axis under control of machine tool, meanwhile, an X-direction or a Y-direction superposition motion is superimposed on the X-direction or the Y-direction, and the Z-axis is usedfor carrying out corresponding movement according to the surface shape of the subunit. The processing method breaks through the limitation that an existing array processing method can only process a spherical array on a hard brittle material, and a non-spherical array structure can be precisely machined on the hard brittle material.