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CN108956806A SF6/CF4混合气体放电装置及分解产物检测方法 无效 - 驳回

SF6/CF4混合气体放电装置及分解产物检测方法
摘要：
一种SF6/CF4混合气体放电装置及分解产物检测方法，属于气体检测领域。该SF6/CF4混合气体放电装置，包括高压电源产生单元、SF6/CF4混合气体放电单元、SF6/CF4混合气体充气单元和气质联用检测单元；该SF6/CF4混合气体的分解产物检测方法为：调节装置，抽真空，向放电腔充气；对放电腔施加电压，当放电腔中的正电极和负电极间隙击穿时，记录此时的混合比、电压值、电流值、放电持续时间，停止供电，一部分分解产物气体进入GC‑MS检测单元中检测，检测数据通过GC‑MS工作站进行分析。该装置简单、正负极距离可调，其是能实现从产生电弧从而使SF6/CF4混合气体发生分解，进而检测的集成装置，该方法具有灵敏度高、分析效果高、定量准确等优点。
摘要（英）：

The invention discloses a SF6/CF4 mixed gas discharge device and a decomposition product detection method and belongs to the field of gas detection. The SF6/CF4 mixed gas discharge device comprises ahigh voltage power generation unit, an SF6/CF4 mixed gas discharge unit, an SF6/CF4 mixed gas inflation unit and a GC/MS detection unit. The detection method comprises: adjusting a device, carrying out vacuuming, inflating a discharge chamber, applying voltage to the discharge chamber, when a positive electrode and a negative electrode in the discharge chamber are subjected to clearance breakdown,recording a mixing ratio, a voltage value, a current value and discharge duration time at the moment, stopping power supply, feeding a part of decomposition product gas into the GC/MS detection unit,carrying out detection and analyzing the detection data through a GC-MS workstation. The detection integrated device is simple and the distance between the positive and negative electrodes is adjustable so that the arc is produced to decompose the SF6/CF4 mixed gas. The method has the advantages of high sensitivity, high analytical effect and accurate quantification.

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