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发明公开
CN108996490A 一种碳纳米管阵列的制备方法 审中-实审

一种碳纳米管阵列的制备方法
摘要：
本发明涉及一种碳纳米管阵列的制备方法，其包括以下步骤：提供一包括至少一个通孔的基底，将该基底的两个表面分别定义为第一表面和第二表面，所述通孔贯穿第一表面和第二表面；将催化剂沉积在所述基底的第一表面；在保护气体的环境下，加热所述基底至碳纳米管阵列的生长温度，通过一通气元件将碳源气通至所述基底的第二表面，所述碳源气经由所述基底的通孔与所述催化剂接触在该基底的第一表面生长碳纳米管阵列；停止通入碳源气，改变所述基底的温度至一预定温度，通过所述通气元件将氧气或含氧气的混合气体通至所述基底的第二表面，所述氧气或含氧气的混合气体经由所述基底的通孔与所述碳纳米管阵列接触并反应。
摘要（英）：

A method for making a carbon nanotube array includes providing a substrate having a first substrate surface and a second substrate surface opposite to the first substrate surface. The substrate has a plurality of through holes spaced from each other, and each of the plurality of through holes extends from the first substrate surface to the second substrate surface. A catalyst layer is deposited on the first substrate surface, to form a composite structure. The composite structure is placed in a chamber. The carbon source gas and protective gas are supplied to the chamber, and the composite structure is heated to a first temperature, to grow a carbon nanotube array on the first substrate surface.

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