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发明公开
CN109020259A 一种石英坩埚的表面处理工艺 无效 - 撤回

一种石英坩埚的表面处理工艺
摘要：
本发明涉及一种英坩埚表面处理方法，其特征是：包括如下步骤，自来水冲洗石英坩埚、混合液浸泡石英坩埚、去离子水冲淋步骤、去离子水浸泡步骤、去离子水冲淋步骤和烘干步骤，其中混合液浸泡步骤中混合液由带氟盐、盐酸和过氧化合物混合而成，带氟盐、盐酸和过氧化合物的质量浓度分别为0.1‑99.99％，三种试剂的体积比为(1‑99)∶(1‑99)∶(1‑99)，浸泡时间为50‑100min，混合液的温度：50～80℃。本发明的优点是：本发明石英坩埚表面处理方法，对石英坩埚进行表面处理，最终石英坩埚的表面金属杂质含量可降低1‑2个数量级，降低坩埚内表面0‑150μm厚度内的气泡浓度，同时还可清除石英坩埚表面的微颗粒。
摘要（英）：

The invention relates to a surface treatment technology for a quartz crucible. The method is characterized by including the steps of: flushing of the quartz crucible with tap water, soaking of the quartz crucible with a mixed solution, deionized water showering, soaking with deionized water, deionized water showering and drying. Specifically, the mixed solution involved in the step of mixing withthe mixed solution is formed by mixing of a fluoride salt, hydrochloric acid and a peroxide compound that respectively have a mass concentration of 0.1-99.99%, the three reagents are in a volume ratioof (1-99):(1-99):(1-99), the soaking time is 50-100min, and the temperature of the mixed solution is 50-80DEG C. The surface treatment method for a quartz crucible provided by the invention performssurface treatment on the quartz crucible, finally can reduce the surface metal impurity content of the quartz crucible by 1-2 orders of magnitude, reduce the 0-150micron thick bubble concentration onthe inner surface of the crucible, and also can eliminate micro-particles on the quartz crucible surface.

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