The invention discloses an equipment part geometrical characteristic precision control method. The method comprises the following steps of S1, storing basis parts and assembly parts; S2, planning a big path; S3, establishing coordinate points; S4, taking parts for compensation; and S5, placing the parts for compensation. In the step S2, the coordinate points include all inflection points of the traveling path. According to the equipment part geometrical characteristic precision control method, the basis parts and the assembly parts are placed in the fixed positions according to the planning and can be arranged according to the assembly sequence. The assembly path can be effectively optimized, and the assembly efficiency can be improved. The assembly process is calibrated through a CCD camera. Accordingly, the assembly precision is improved.