利索-全球专利检索

  1. 登录
  2. 注册
发明公开
CN109628887A 一种真空镀膜机 无效 - 驳回

  • 专利标题： 一种真空镀膜机
  • 专利标题（英）： Vacuum coating machine
  • 申请号： CN201910050898.6
    申请日： 2019-01-20
  • 公开(公告)号： CN109628887A
    公开(公告)日： 2019-04-16
  • 发明人: 邱晖
  • 申请人： 邱晖
  • 申请人地址： 福建省厦门市集美区嘉庚路43号-6-401
  • 专利权人： 邱晖
  • 当前专利权人： 邱晖
  • 当前专利权人地址： 福建省厦门市集美区嘉庚路43号-6-401
  • 主分类号： C23C14/24
  • IPC分类号： C23C14/24 ;  C23C14/34 ;  C23C14/50
一种真空镀膜机
摘要：
本发明公开了一种真空镀膜机，包括真空腔体、位于真空腔体顶部中间位置的镀膜鼓、位于所述镀膜鼓下方的蒸发器、位于真空腔体内两侧的靶材、以及靠近所述靶材且可以转动的工件架，所述镀膜鼓上卷绕有需要进行蒸镀的基材，所述蒸发器加热时，在蒸发器和镀膜鼓之间形成有蒸镀空间。本发明的真空镀膜机一方面能在蒸发器的作用下将镀膜材料加热蒸发，镀膜材料蒸发后向上扩散到镀膜鼓处，附着在温度较低的镀膜鼓的基材上，形成厚薄均匀的薄膜；另一方面，工件架在转动的同时均可旋转至与靶材相对的位置，从而各侧面上的工件均能完成镀膜，镀膜效率高。本发明的结构简单，能够同时进行蒸发镀膜和溅射镀膜，生产效率高，并有利于降低镀膜产品的成本。
摘要（英）：

The invention discloses a vacuum coating machine. The vacuum coating machine comprises a vacuum cavity, a coating drum, an evaporator, target materials and a workpiece frame, wherein the coating drumlocated in the middle of the top of the vacuum cavity, the evaporator is positioned below the coating drum, the target materials are located on the two sides in the vacuum cavity and the workpiece frame is close to the target material and can rotate, a base material needing to be evaporated is wound on the coating drum, when the evaporator is heated, and an evaporation space is formed between theevaporator and the coating drum. According to the vacuum coating machine, on one hand, the coating material can be heated and evaporated under the action of the evaporator, after evaporation of the coating material, the coating material is diffused upwards to the position of the coating drum, so that a thin film with a uniform thickness is formed; on the other hand, the workpiece frame can rotateto a position opposite to the target material while rotating, so that the workpiece on each side surface can complete the film coating, and the film coating efficiency is high; and the vacuum coatingmachine is simple in structure, can simultaneously carry out evaporation coating and sputtering coating, the production efficiency is high, and the cost of the coated product can be reduced.

0/0