The invention provides an analysis method for a Midazolam preparation. The method comprises the following steps of S1) preparation of a sample solution, in which the Midazolam preparation is taken anddigested by a digestion agent for 30-90min to obtain a Midazolam mother liquid, and the mother liquid is diluted by a diluents of dilute nitric acid to obtain the sample solution; and S2) ICP-MS test. The digestion agent is selected from nitric acid and/or hydrogen peroxide. The method can be used to avoid interference of elements such as C and F, improve the atomizing, and improve the detectionaccuracy.