The invention relates to a laser galvanometer precision correction method, device and system. The laser galvanometer precision correction method includes the following steps: a laser beam is controlled to pass through a laser galvanometer according to a preset standard graph, and then a plurality of identification points are engraved on a workpiece; according to acquired images including the identification points, an identification graph including all the identification points is determined; the standard graph and the identification graph are compared, and calibration parameters are determinedaccording to a comparison result; and a correction document of the laser galvanometer is updated according to the correction parameters. According to the technical scheme, the correction efficiency of the laser galvanometer can be improved, and the correction accuracy is ensured, so that the working efficiency of the whole process of laser processing is improved.