The invention provides a mask plate module and a preparation method thereof. The mask plate module comprises a frame and at least two first mask strips; each first mask strip is arranged between two opposite edge frames of the frame; and the deviation quantity of each first mask strip relative to a reference position is within a target deviation range. The deviation quantity of each first mask strip is within the target deviation range; and under the condition of generation of equal quadrilateral deformation by the frame, the overall deformation of the formed mask plate module is reduced to reduce or counteract the deformation influence of the frame. The mask plate module can improve the PPA of an evaporation unit, and improves the use effect and the product yield.