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发明公开
CN110178038A 扫描仪及扫描型探针显微镜 有权

扫描仪及扫描型探针显微镜
摘要：
本发明提供一种能够使大范围的测量和高速、高精度的测量同时实现的扫描仪。该扫描仪包括：外框；第1内框，其配置在外框的内侧；广域Y驱动器，其用于使第1内框相对于外框在Y方向上相对地移动；第2内框，其配置在第1内框的内侧；广域X驱动器，其用于使第2内框相对于第1内框在与Y方向正交的X方向上相对地移动；第3内框，其配置在第2内框的内侧；狭域Y驱动器，其用于使第3内框相对于第2内框在Y方向上相对地移动；可动基座，其配置在第3内框的内侧；以及狭域X驱动器，其用于使可动基座相对于第3内框在X方向上相对地移动。
摘要（英）：

Provided is a scanner that enables wide-range measurements as well as high-accuracy and high-speed measurement. Provided is a scanner comprising: an outer frame; a first inner frame that is disposed inside the outer frame; a wide-area Y actuator that moves the first inner frame in relative fashion in a Y direction with respect to the outer frame; a second inner frame that is disposed inside the first inner frame; a wide-area X actuator that moves the second inner frame in relative fashion in an X direction, which is orthogonal to the Y direction, with respect to the first inner frame; a thirdinner frame that is disposed inside the second inner frame; a narrow-area Y actuator that moves the third inner frame in relative fashion in the Y direction with respect to the second inner frame; a movable base that is disposed inside the third inner frame; and a narrow-area X actuator that moves the movable base in relative fashion in the X direction with respect to the third inner frame.

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