A fluid regulator includes a regulator body having a fluid inlet and a fluid outlet connected by a fluid flow path, with a portion of the regulator body forming a first chamber, an orifice disposed in the fluid flow path, a seat, and a control element disposed within the fluid flow path and shift-able between an open position spaced away from the seat and a closed position seated against the seat, with the control element arranged to respond to fluid pressure changes to control flow of a process fluid through the orifice. A diaphragm has a radially inner portion that is operatively coupled to the control element and a radially outer portion that is operatively coupled to the regulator body. The diaphragm includes a resilient redundant diaphragm sandwiched between two metal diaphragms, the diaphragm providing two separate seals.