The invention discloses a method for analyzing trace permanent gases in SF6 based on GC-Q-ToF-MS. A GasProo gas chromatographic column combined with a high-resolution time-of-flight mass spectrum is used for firstly separating and then detecting eight kinds of trace gases CF4, CO2, C2F6, COS, C3F8, SO2F2, CS2 and SO2 in high-concentration SF6, and the qualitative and quantitative detection of theeight kinds of trace gases is realized according to a linear relation between the concentration of the gases and integral values of signals of corresponding secondary mass spectrum characteristic ionsCF4 +, CO2 +, C2F5 +, COS +, C3F7 +, SO2F2 +, CS2 + and SO2 +. The method has the advantages of accurate and reliable qualitative and quantitative determination, high sensitivity and low detection limit, and is expected to become a standard method for analyzing a variety of trace permanent gas mixtures. The method disclosed by the invention can also be directly used for the accurate qualitative and quantitative analysis of eight kinds of trace permanent gases in SF6 high-voltage circuit breakers, and is used for further inferring the fault types of power equipment and providing reference fora standard monitoring method of the operation of SF6 high-voltage power equipment.