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发明公开
CN1494603A 具有用于较大表面积的靶的强力磁引导装置的电弧蒸发器 失效 - 权利终止

具有用于较大表面积的靶的强力磁引导装置的电弧蒸发器
摘要：
本发明涉及一种电弧蒸发器，包括一阳极(1)和一阴极或靶(2)并用于产生准备施加到真空室内需涂覆部分(10)的蒸发材料。本发明的蒸发器还包括一磁引导装置，用于确保电弧以均匀的方式在靶的整个表面上运动。所述磁引导装置包括两个独立的磁系统，其中第一磁系统由一组永磁体(3)构成，该永磁体设置在阴极或靶(2)的周边并且以如下方式设置成或多或少地与靶(2)共面，即其磁化强度要垂直于所述靶(2)的表面；第二磁系统由一电磁体(4－5)构成，该电磁体设置在靶(2)的后部并且与所述靶间隔开一距离地放置在蒸发器电绝缘主体(6)内，其中至少一个磁极设置成与上述靶(2)的表面相平行。这样，两个磁系统的结合作用就确保了靶(2)被均匀地使用或消耗，同时又提高了蒸发器的稳定性。
摘要（英）：

The invention relates to an arc evaporator comprising an anode and a cathode or target, which is used to produce the evaporated material that is be applied to the part to be covered inside a vacuum chamber. The inventive evaporator also comprises a magnetic guide which is used to ensure that the electric arc moves over the entire surface area of the target in a homogeneous manner. The magnetic guide comprises two independent magnetic systems: the first of siad magnetic systems consists of a group of permanent magnets which are disposed on the periphery of the cathode or target and arranged to be more or less coplanar with said target in such a way that the magnetisation thereof is perpendicular to the surface area of the target; the second magnetic system consists of an electromagnet which is located on the rear part of the target and which is housed in the electrically insulating body of the evaporator at a certain distance from said target, with at least one of the magnetic poles thereof being parallel to the surface area of the target. In this way, the combined action of the two magnetic systems ensures that the target is used or worn down uniformly, while the reliability of the evaporator is increased.

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