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发明授权
CN1670624B 蚀刻组合物 有权 复审申请

蚀刻组合物
摘要：
本发明涉及薄膜晶体管液晶显示装置的蚀刻组合物，为了对薄膜晶体管液晶显示装置的透明导电膜(ITO膜)进行选择性地蚀刻，所用的蚀刻组合物中含有盐酸、醋酸、添加剂及超纯水，它们随时间的变化小，将对于其他的配线的影响最小化，从而实现了对薄膜的稳定蚀刻，且蚀刻速度快，减轻了侧蚀。
摘要（英）：

To provide an etching composition for a thin-film transistor liquid-crystal display device employed for selective etching of a transparent conductive film (such as an ITO film) of the thin-film transistor liquid-crystal display, the etching composition having a property of a low aging rate, minimizing the influence on other metal wirings so that a stable etching can be effected, and having a highetching rate and the capability of reducing side etching.

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