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发明授权
CN1962211B 基板的切断装置 有权

基板的切断装置
摘要：
在切断基板(1)而单片化为器件(5)的切断组件(60)的切断加工区域(50)中，配置具有对基板(1)(器件(5))喷射高压水而进行毛刺去除的喷嘴(72)的高压水喷射组件(70)。
摘要（英）：

In the cutting manufacturing district (50) for the cutting module (60) when cutting the substrate (1) and the monolithic being changed into the device (5), is disposed with a hydraulic spray module (70) spraying high pressure water to the substrate (1) (device 5) and having a nozzle (72) to process burr removal.

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