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实用新型
CN201785480U 一种阴极镀膜设备 失效 - 权利终止

一种阴极镀膜设备
摘要：
本实用新型公开了一种阴极镀膜设备，包括有壳体，壳体底部有管口，壳体顶部有顶盖，壳体顶部两端外有螺线包，壳体顶部中有竖向屏蔽罩，壳体中有两层中间有开孔的横向屏蔽罩，上层的横向屏蔽罩开孔中安装有支架，壳体中靠近管口有靶材，壳体顶部两端还有灯丝，灯丝与竖向屏蔽罩之间还有半圆形屏蔽罩，从横向屏蔽罩、靶材及半圆形屏蔽罩上分别有导线从壳体底部引出。
摘要（英）：

The utility model discloses cathode coating equipment which comprises a shell, wherein a pipe orifice is arranged at the bottom of the shell, a top cover is arranged at the top of the shell, spiral wire ladles are arranged outside two ends of the top of the shell, a vertical shielding case is arranged in the top of the shell, two layers of transverse shielding cases with holes in the middle are arranged in the shell, wherein a bracket is arranged in the hole of the transverse shielding case at the upper layer, a target material is arranged close to the pipe orifice in the shell, filaments are arranged at two ends of the top of the shell, a semicircular shielding case is also arranged between the filaments and a vertical shielding case, and leads are led out from the bottom of the shell respectively from the transverse shielding cases, the target material and the semicircular shielding case.

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