The utility model relates to a control circuit of vacuum part connects the keyboard respectively by the ARM controller, the host computer, and LCD, connection valves 1-n is distinguished through the optical coupling isolation module to the ARM controller, and the ARM controller is connected with vacuum parts 485 respectively through RS485 through level conversion module, and the component is connected with vacuum parts 232 respectively through GM8125 serial port expansion module a, GM8125 serial port expansion module b and GM8125 serial port expansion module c and RS232 to the ARM controller control circuit can carry out the information interaction with the host computer, and all right independent control vacuum parts obtain the working condition of each vacuum parts in real time and show but vacuum parts designs is the plug-in, makes up according to the vacuum parts of demand to control, has increased the debugging flexibility the stability of vacuum control's reliability with is improved. The problem of the manual control of secondary ion mass spectrograph to different vacuum part is solved. High vacuum environment for the mass spectrograph provides dual guarantee, provides effective protection to the vacuum parts