The utility model provides a preparation facilities of trace high purity water specifically contains: alkali lye container, anion -exchange column, first post, the muddy post of second, a plurality of valve of mixing, the alkali lye container links to each other with the anion -exchange column input, anion -exchange column and the first post input that mixes link to each other with the water inlet respectively, the anion -exchange column output links to each other with first muddy post input and delivery port respectively, the first post output that mixes links to each other with the muddy post input of second, the second mixes the post output and links to each other with the delivery port, the water inlet links to each other with the delivery port. With this, provide the device of a convenience, swift preparation trace high purity water to can eliminate in the air carbon dioxide to an influence of water quality, can be used to in the check -up thermal power plant chemical instrument like the check -up of electric conductance counting rate meter, pH table, solve the problem of the no check -up benchmark of this type of table meter.