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实用新型
CN207031539U 用于生产镀膜玻璃的镀膜装置 有权

用于生产镀膜玻璃的镀膜装置
摘要：
本实用新型提供一种用于生产镀膜玻璃的镀膜装置，镀膜装置包括传输单元、气体隔离单元、抽真空单元、冷却单元、至少3个隔离腔室、以及阴极靶材；其中3个所述隔离腔室分别为第一隔离腔室，第二隔离腔室、第三隔离腔室，3个所述隔离腔室依次连接，每个隔离腔室的顶部都设置可打开的盖板；每个隔离腔室内的下部都设置传输单元，所述传输单元贯通所有隔离腔室；第一隔离腔室以及第三隔离腔室内设置气体隔离单元；第一隔离腔室以及所述第三隔离腔室的盖板上都设置抽真空单元；所述第二隔离腔室中设置阴极靶材以及冷却单元。本实用新型使用更加便捷，气体隔离装置隔离性能好，隔离系数高，结构简单。(ESM)同样的发明创造已同日申请发明专利
摘要（英）：

The utility model provides a coating film device for producing coated glass, coating film device include the transmission unit, gaseous keep apart the unit, take out vacuum unit, cooling unit, at least 3 keep apart cavities and cathode target material, wherein 3 keeping apart the cavity and being first isolation cavity respectively, the second septum leaves cavity, third isolation cavity, 3 keeping apart the cavity and connecting gradually, every top that keeps apart the cavity all sets up the apron that can open, every lower part that keeps apart in the cavity all sets up the transmission unit, the transmission unit link up all keeps apart the cavity, set up the gaseous unit of keeping apart in first isolation cavity and the third isolation cavity, first isolation cavity and it takes outvacuum unit all to set up on the apron of third isolation cavity, the second septum sets up cathode target material and cooling unit in the cavity. The utility model discloses it is more convenient touse, and gaseous isolating device isolation performance is good, keeps apart the coefficient height, simple structure.

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