发明公开
EP0139366A1 Method of manufacturing a soldi-state image pickup device
失效
Verfahren zum Herstellen einerFestkörper-Bildaufnahmevorrichtung。
- 专利标题: Method of manufacturing a soldi-state image pickup device
- 专利标题(中): Verfahren zum Herstellen einerFestkörper-Bildaufnahmevorrichtung。
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申请号: EP84305337.2申请日: 1984-08-06
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公开(公告)号: EP0139366A1公开(公告)日: 1985-05-02
- 发明人: Harada, Nozomu Patent Division Toshiba Corp. , Komatsubara, Yoshiaki Patent Division
- 申请人: KABUSHIKI KAISHA TOSHIBA
- 申请人地址: 72, Horikawa-cho, Saiwai-ku Kawasaki-shi, Kanagawa-ken 210 JP
- 专利权人: KABUSHIKI KAISHA TOSHIBA
- 当前专利权人: KABUSHIKI KAISHA TOSHIBA
- 当前专利权人地址: 72, Horikawa-cho, Saiwai-ku Kawasaki-shi, Kanagawa-ken 210 JP
- 代理机构: Shindler, Nigel
- 优先权: JP153761/83 19830823
- 主分类号: H01L21/90
- IPC分类号: H01L21/90 ; H01L27/14
摘要:
When a "two-level" solid state image pickup device is manufactured, part of a first metallic electrode (28a) electrically connected to a signal storage region (24b) is made to project to the highest position above a substrate on which it is formed. A coating of an organic insulating film (29) is then applied to produce a flat surface. The entire surface of the organic film is then etched to expose the projections (A) of the first metallic electrode (28a) and a second metallic electrode (28b) constituting a pixel electrode is connected to the first electrode (28a) at the exposed portion thereof.
公开/授权文献
- EP0139366B1 Method of manufacturing a soldi-state image pickup device 公开/授权日:1988-10-12
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