发明公开
- 专利标题： A method of making a component for a microelectronic circuit and a semiconductor device and an optical waveguide made by that method
- 专利标题（中）： 通过该方法制造微电子电路和半导体器件和光波导的组件的方法
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申请号： EP85305242申请日： 1985-07-23
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公开(公告)号： EP0171226A3公开(公告)日： 1987-08-26
- 发明人: Hovel, Harold John , Kuech, Thomas Francis
- 申请人： International Business Machines Corporation
- 专利权人： International Business Machines Corporation
- 当前专利权人： International Business Machines Corporation
- 优先权： US635975 19840730
- 主分类号： H01L21/31
- IPC分类号： H01L21/31
摘要：
A portion of a first layer (14; 34) exposed through an opening (20; 40) in a second layer (18; 38) is chemically converted to a compound having properties different to those of the first layer. By arranging that the conversion to the compound extends beyond the boundary of the opening and removing the compound, further material (24) can be depositied onto the substrate (12) through the opening (201. In this manner, a self-aligned semiconductor device can be formed with the further material (24) serving as the gate of the device. If the conversion to the compound is limited to the portion of the first layer directly below the opening (40) and the compound has an index of refraction different from that of the first layer, the converted portion (36) can serve as an optical waveguide.
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