发明授权
EP0187866B1 SURFACE ULTRASONIC WAVE INTERFERENCE MICROSCOPE 失效
表面超声波干扰显微镜

  • 专利标题: SURFACE ULTRASONIC WAVE INTERFERENCE MICROSCOPE
  • 专利标题(中): 表面超声波干扰显微镜
  • 申请号: EP85903386.2
    申请日: 1985-07-08
  • 公开(公告)号: EP0187866B1
    公开(公告)日: 1989-12-06
  • 发明人: Chubachi, Noriyoshi
  • 申请人: Chubachi, Noriyoshi
  • 申请人地址: 4-6-203 Katahira 1-chome Sendai-shi Miyagi JP
  • 专利权人: Chubachi, Noriyoshi
  • 当前专利权人: Chubachi, Noriyoshi
  • 当前专利权人地址: 4-6-203 Katahira 1-chome Sendai-shi Miyagi JP
  • 代理机构: Blumbach Weser Bergen Kramer
  • 优先权: JP141204/84 19840708; JP51190/85 19850313
  • 国际公布: WO8600710 19860130
  • 主分类号: G01N29/00
  • IPC分类号: G01N29/00
SURFACE ULTRASONIC WAVE INTERFERENCE MICROSCOPE
摘要:
A transmitting, focusing, ultrasonic wave transducer (20) is excited by high-frequency pulses sent from a high-frequency pulse generator (1); the leakage elastic surface waves are excited in a sample (6) by the focusing ultrasonic wave beams of the transducer (20); the waves emitted again are received by a receiving focusing ultrasonic wave transducer (24); the received signals are sent to a mixer (23) where a difference in phase is detected relative to reference signals produced from a high-frequency oscillator (18) in the high-frequency pulse generator (1); and the detected output is supplied as a display signal to a display (9 or 14). The transducers (20, 24) and the sample (6) are relatively moved by a moving device (7 or 10) two-dimensionally on a plane parallel to the surface of the sample or at right angles to the surface of the sample. In synchronism with this movement, the surface of the display (9 or 14) is swept to obtain an ultrasonic microscopic image or a V(z) curve on the display surface.
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