发明公开
EP0200110A1 Photosensitive composition and pattern forming process using same
失效
一种光敏组合物和方法用于产生该组合物所需要的图案。
- 专利标题： Photosensitive composition and pattern forming process using same
- 专利标题（中）： 一种光敏组合物和方法用于产生该组合物所需要的图案。
-
申请号： EP86105341.1申请日： 1986-04-17
-
公开(公告)号： EP0200110A1公开(公告)日： 1986-11-05
- 发明人: Morishita, Hajime , Nonogaki, Saburo , Hayashi, Nobuaki , Uchino, Shoichi , Nishizawa, Masahiro , Miura, Kiyoshi , Sasaya, Osamu , Tomita, Yoshifumi
- 申请人： HITACHI, LTD.
- 申请人地址： 6, Kanda Surugadai 4-chome Chiyoda-ku, Tokyo 100 JP
- 专利权人： HITACHI, LTD.
- 当前专利权人： HITACHI, LTD.
- 当前专利权人地址： 6, Kanda Surugadai 4-chome Chiyoda-ku, Tokyo 100 JP
- 代理机构： Beetz & Partner Patentanwälte
- 优先权： JP80128/85 19850417
- 主分类号： G03C5/00
- IPC分类号： G03C5/00 ; G03C1/60 ; H01J29/22
摘要：
A photosensitive composition comprising (1) at least one diazonium compound selected from among salts and double salts of diazonium ions represented by the general formulas:
wherein A stands for a substituent selected from among
and
wherein R, and R 2 each stand for an alkyl or benzyl group with the proviso that the total number of carbon atoms of R, and R 2 is 8 to 16, and (2) at least one nitrate selected from the group consisting of calcium nitrate and magnesium nitrate and a pattern forming process using such a composition.
This composition gets sticky upon exposure to light.
wherein A stands for a substituent selected from among
and
wherein R, and R 2 each stand for an alkyl or benzyl group with the proviso that the total number of carbon atoms of R, and R 2 is 8 to 16, and (2) at least one nitrate selected from the group consisting of calcium nitrate and magnesium nitrate and a pattern forming process using such a composition.
This composition gets sticky upon exposure to light.
公开/授权文献
信息查询
