发明公开
- 专利标题: Force sensor using a vibrating element
- 专利标题(中): 使用振动元件的力传感器
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申请号: EP86309687.1申请日: 1986-12-11
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公开(公告)号: EP0232610A3公开(公告)日: 1989-11-23
- 发明人: Langdon, Roger Martin
- 申请人: THE GENERAL ELECTRIC COMPANY, p.l.c.
- 申请人地址: 1 Stanhope Gate London W1A 1EH GB
- 专利权人: THE GENERAL ELECTRIC COMPANY, p.l.c.
- 当前专利权人: THE GENERAL ELECTRIC COMPANY, p.l.c.
- 当前专利权人地址: 1 Stanhope Gate London W1A 1EH GB
- 代理机构: Lawrence, Brian Richard
- 优先权: GB8530809 19851213
- 主分类号: G01L1/16
- IPC分类号: G01L1/16 ; G01L1/10 ; G01L9/08
摘要:
A sensor comprises a beam 1, e.g. of silicon, which resonates at a frequency dependent on the force imposed on the beam. Light on line 11 induces resonance of the beam 1 by means of the photothermal effect. The light reflected from the beam 1 is amplitude modulated at the resonance frequency, and returns along line 11. It is reflected by semi-reflecting plane mirror 17 onto lens 19 which focusses it onto photodetector 20. Photodetector 20 produces an output voltage modulated at the oscillation frequency, and is thus representative of the force imposed on beam 1.
公开/授权文献
- EP0232610A2 Force sensor using a vibrating element 公开/授权日:1987-08-19
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