发明公开
EP0232610A3 Force sensor using a vibrating element 失效
使用振动元件的力传感器

Force sensor using a vibrating element
摘要:
A sensor comprises a beam 1, e.g. of silicon, which resonates at a frequency dependent on the force imposed on the beam. Light on line 11 induces resonance of the beam 1 by means of the photothermal effect. The light reflected from the beam 1 is amplitude modulated at the resonance frequency, and returns along line 11. It is reflected by semi-reflecting plane mirror 17 onto lens 19 which focusses it onto photodetector 20. Photodetector 20 produces an output voltage modulated at the oscillation frequency, and is thus representative of the force imposed on beam 1.
公开/授权文献
信息查询
0/0