发明公开
EP0290647A1 Oscillating quartz atomic force microscope
失效
AtomarsKräftemikroskopmit oscillierendem Quarz。
- 专利标题: Oscillating quartz atomic force microscope
- 专利标题(中): AtomarsKräftemikroskopmit oscillierendem Quarz。
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申请号: EP87106899.5申请日: 1987-05-12
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公开(公告)号: EP0290647A1公开(公告)日: 1988-11-17
- 发明人: Pohl, Wolfgang Dieter, Dr.
- 申请人: International Business Machines Corporation
- 申请人地址: Old Orchard Road Armonk, N.Y. 10504 US
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: Old Orchard Road Armonk, N.Y. 10504 US
- 代理机构: Rudack, Günter O., Dipl.-Ing.
- 主分类号: G01L1/08
- IPC分类号: G01L1/08 ; G01L1/16
摘要:
This atomic force microscope comprises a pointed tip (1) mounted on top of an oscillating crystal (2) which is translatable in xyz-directions by a conventional xyz-drive (4). A potential applied to a pair of electrodes (5, 6) coated on opposite faces of said crystal (2) causes the latter to oscillate with its resonance frequency. As the tip (1) is approached to a surface to be investigated, the frequency of oscillation of the crystal deviates from its original frequency. This deviation can be used in a feedback loop to control the distance in z-direction of the tip (1) from the surface being investigated and to plot an image of the contour of each scan performed by the tip (1) across the surface.
公开/授权文献
- EP0290647B1 Oscillating quartz atomic force microscope 公开/授权日:1991-07-24
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