发明公开
EP0319797A3 Method and apparatus for measuring defect density and defect distribution
失效
用于测量缺陷密度和缺陷分布的方法和装置
- 专利标题： Method and apparatus for measuring defect density and defect distribution
- 专利标题（中）： 用于测量缺陷密度和缺陷分布的方法和装置
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申请号： EP88119684.4申请日： 1988-11-25
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公开(公告)号： EP0319797A3公开(公告)日： 1990-05-23
- 发明人: Moriya, Kazuo
- 申请人： MITSUI MINING & SMELTING CO., LTD.
- 申请人地址： 1-1, 2chome Nihombashi-Muromachi Chuo-ku Tokyo JP
- 专利权人： MITSUI MINING & SMELTING CO., LTD.
- 当前专利权人： MITSUI MINING & SMELTING CO., LTD.
- 当前专利权人地址： 1-1, 2chome Nihombashi-Muromachi Chuo-ku Tokyo JP
- 代理机构： Kraus, Walter, Dr.
- 优先权： JP309420/87 19871209
- 主分类号： G01N21/88
- IPC分类号： G01N21/88 ; G06T7/60
摘要：
A method and apparatus for measuring a defect distribution comprising introducing a narrowed laser beam into an object to be observed, receiving scattering lights generated at the defect portions of the object by a photoelectric conversion element, and measuring automatically the density and density distribution of the defects inside the object on the basis of the output image data of the photoelectric conversion element.
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