发明授权
- 专利标题: Complementary metal oxide silicon (CMOS) device structure
- 专利标题(中): CMOS类型的安排
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申请号: EP88120242.8申请日: 1988-12-05
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公开(公告)号: EP0321763B1公开(公告)日: 1996-05-01
- 发明人: Kenney, Donald McAlpine
- 申请人: International Business Machines Corporation
- 申请人地址: Old Orchard Road Armonk, N.Y. 10504 US
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: Old Orchard Road Armonk, N.Y. 10504 US
- 代理机构: Schäfer, Wolfgang, Dipl.-Ing.
- 优先权: US135954 19871221
- 主分类号: H01L23/52
- IPC分类号: H01L23/52 ; H01L23/528 ; H01L21/74 ; H01L21/82
公开/授权文献
- EP0321763A3 Complementary metal oxide silicon (CMOS) device structure 公开/授权日:1990-09-19
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