A method of making an image pickup tube target (Fig. 1A), etc., using an amorphous photoconductive layer (4). When an electrode (2 or 7), an amorphous semicon­ductor layer (4), etc., are provided on a substrate (1 or 6), the steps of ion etching away a surface of the substrate (1 or 6) and forming the electrode (2 or 7) are performed so that a target (Fig. 1A) is produced in which no defects are substantially caused in a reproduced image even if a high electric field is applied across the target.