发明公开
- 专利标题: A telecentric imaging system
- 专利标题(中): 电子成像系统
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申请号: EP89302766.4申请日: 1989-03-21
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公开(公告)号: EP0335559A3公开(公告)日: 1991-08-28
- 发明人: Kochba, Joseph , Katzir, Yigal
- 申请人: ORBOTECH LTD
- 申请人地址: P.O. Box 215, Industrial Zone Yavne 70651 IL
- 专利权人: ORBOTECH LTD
- 当前专利权人: ORBOTECH LTD
- 当前专利权人地址: P.O. Box 215, Industrial Zone Yavne 70651 IL
- 代理机构: Goodanew, Martin Eric
- 优先权: IL85862 19880324
- 主分类号: G02B13/22
- IPC分类号: G02B13/22 ; G01B11/24 ; G01N21/88
摘要:
A telecentric imaging system is described comprising a Fresnel lens (2) mountable in proximity to an object (8) to be imaged, a source of light (12) for illuminating the object, and an aperture stop (6) located at least in vicinity of the back focal point of the Fresnel lens (2). There is also described an optical inspection machine incorporating the telecentric imaging system and a method for software correction of the optical distortion produced by the telecentric imaging system.
公开/授权文献
- EP0335559B1 A telecentric imaging system 公开/授权日:1996-02-28
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