Method of and apparatus for manufacturing a crystalline diamond film for use as an acoustic diaphragm
摘要:
An acoustic diaphragm is made of a crystalline diamond film formed on at least one side of a ceramic diaphragm base member formed in the shape of diaphragm, the crystalline diamond film being formed by thermal-­plasma emitting a mixture gas composed of argon, hydrocarbon and hydrogen onto the base member.
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