发明公开
EP0366851A1 Low-voltage source for narrow electron/ion beams
失效
Niederspannungsquellefürschmale Elektronen- /Ionenstrahlenbündel。
- 专利标题: Low-voltage source for narrow electron/ion beams
- 专利标题(中): Niederspannungsquellefürschmale Elektronen- /Ionenstrahlenbündel。
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申请号: EP88810742.2申请日: 1988-11-01
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公开(公告)号: EP0366851A1公开(公告)日: 1990-05-09
- 发明人: Fink, Hans-Werner, Dr. , Morin, Roger, Dr. , Schmid, Heinz , Stocker, Werner
- 申请人: International Business Machines Corporation
- 申请人地址: Old Orchard Road Armonk, N.Y. 10504 US
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: Old Orchard Road Armonk, N.Y. 10504 US
- 代理机构: Rudack, Günter Otto (DE)
- 主分类号: H01J37/073
- IPC分类号: H01J37/073
摘要:
This source for charged particles comprises a sharply pointed tip (1) and an aperture (2) in a thin sheet of material. If the point of the tip (1) is made sharp enough, i.e., if it ends in a single atom or a trimer of atoms, the electric field existing between the tip (1) and the aperture (2) will cause a stream of electrons to be emitted from the tip (1), pass the aperture (2) and to continue as a beam (4) of free electroms beyond said aperture (2). The sheet (3) carrying the aperture (2) may, for example, be a carbon foil or a metallic foil, including gold.
The distance of the tip (1) from the aperture (2) is in the submicron range, and so is the diameter of said aperture (2). The distance is being held essentially constant by means of a feedback loop system. The divergence of the beam (4) is
If the source is operated in an ultra-high vacuum, the particle beam (4) will consist of free electrons, whereas, if the source is operated in a noble-gas atmospere, the beam (4) will consist of noble-gas ions. Both, the electron beam, as well as the ion beam, contains particles of a very low frequemcy.
The distance of the tip (1) from the aperture (2) is in the submicron range, and so is the diameter of said aperture (2). The distance is being held essentially constant by means of a feedback loop system. The divergence of the beam (4) is
If the source is operated in an ultra-high vacuum, the particle beam (4) will consist of free electrons, whereas, if the source is operated in a noble-gas atmospere, the beam (4) will consist of noble-gas ions. Both, the electron beam, as well as the ion beam, contains particles of a very low frequemcy.
公开/授权文献
- EP0366851B1 Low-voltage source for narrow electron/ion beams 公开/授权日:1994-02-16
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