发明公开
EP0402880A3 Method for manufacturing multiturn thin film coil 失效
制造多层薄膜线圈的方法

Method for manufacturing multiturn thin film coil
摘要:
A method for manufacturing a multiturn coil or a film magnetic head including a multiturn coil. This multiturn coil manufacturing method includes the following steps. First a laminate (15, 45) made up of conducting layers (14a-14d, 47a-47d) for coil and insulating layers (13a-13d, 46a-46d) for coil is formed on a substrate (10) and a base layer (11) formed on it at a given inclina­tion (ϑ). Then, this laminate (15, 45) is made U-shaped by photolithography. In the next step the topside of the laminate (15, 45) in both discontinued end sections is flattened for the end faces of all conducting layers are re­vealed at once. Finally, filmy conductive strips (19a-19c, 61a-61c) are formed in these revealed portions to complete a multiturn coil.
公开/授权文献
信息查询
0/0