发明公开
EP0409208A2 Method and apparatus for generating electron channeling patterns
失效
Gerätund Verfahren zur Erzeugung von Beugungsbildern durch Elektronenkanalisierung。
- 专利标题： Method and apparatus for generating electron channeling patterns
- 专利标题（中）： Gerätund Verfahren zur Erzeugung von Beugungsbildern durch Elektronenkanalisierung。
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申请号： EP90113785.1申请日： 1990-07-18
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公开(公告)号： EP0409208A2公开(公告)日： 1991-01-23
- 发明人: Otaka, Tadashi
- 申请人： HITACHI, LTD.
- 申请人地址： 6, Kanda Surugadai 4-chome Chiyoda-ku, Tokyo 100 JP
- 专利权人： HITACHI, LTD.
- 当前专利权人： HITACHI, LTD.
- 当前专利权人地址： 6, Kanda Surugadai 4-chome Chiyoda-ku, Tokyo 100 JP
- 代理机构： Strehl Schübel-Hopf Groening & Partner
- 优先权： JP187351/89 19890721
- 主分类号： H01J37/295
- IPC分类号： H01J37/295
摘要：
An apparatus and a method of obtaining respective electron channeling patterns from a plurality of grains on a sample (12) are disclosed. The sample is scanned by, for example, an electron beam two-dimensionally to specify positions of each of the grains and the positions are compared with an irradiation position of the collimated electron beam for the electron channeling pattern. The sample is moved to cause the positions of each of the grains to coincide with the irradiation position of the collimated electron beam.
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