发明公开
- 专利标题: X-RAY LENS AND COLLIMATOR
- 专利标题(中): X射线镜头和收缩镜
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申请号: EP89906637申请日: 1989-05-02
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公开(公告)号: EP0419518A4公开(公告)日: 1991-10-16
- 发明人: SHARNOFF, MARK
- 申请人: UNIVERSITY OF DELAWARE
- 申请人地址: OFFICE OF RESEARCH & DEVELOPMENT, 210 HULLIHEN HALL; NEWARK, DE 19716
- 专利权人: UNIVERSITY OF DELAWARE
- 当前专利权人: UNIVERSITY OF DELAWARE
- 当前专利权人地址: OFFICE OF RESEARCH & DEVELOPMENT, 210 HULLIHEN HALL; NEWARK, DE 19716
- 优先权: US18952588 1988-05-03
- 主分类号: G21K1/02
- IPC分类号: G21K1/02 ; G02B5/18 ; G03F7/20 ; G21K1/06 ; G21K3/00
摘要:
This invention relates to design and fabrication of broad-band X-ray focussing devices useful in lithographic production of structures of submicron dimension. Such as those employed in integrated electronic circuits. The designs given here exploit the diffractibility of X-radiation by obstacles and apertures (Figure 1), specifically in the Fresnel or nearfield regime. Devices are described that concentrate at least twofold the intensity of white incident X-radiation whose bandwidth may exceed one octave (Figure 6). Their fabrication requires no methods not already in wide use.
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