发明公开
EP0445968A1 Low-temperature sinterable inorganic composition having low dielectric constant
失效
具有低烧结温度和具有低介电常数无机组合物。
- 专利标题： Low-temperature sinterable inorganic composition having low dielectric constant
- 专利标题（中）： 具有低烧结温度和具有低介电常数无机组合物。
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申请号： EP91301655.6申请日： 1991-02-28
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公开(公告)号： EP0445968A1公开(公告)日： 1991-09-11
- 发明人: Kata, Keiichiro, c/o NEC Corporation , Shimada, Yuzo, c/o NEC Corporation
- 申请人： NEC CORPORATION
- 申请人地址： 7-1, Shiba 5-chome Minato-ku Tokyo JP
- 专利权人： NEC CORPORATION
- 当前专利权人： NEC CORPORATION
- 当前专利权人地址： 7-1, Shiba 5-chome Minato-ku Tokyo JP
- 代理机构： Abnett, Richard Charles
- 优先权： JP45538/90 19900228
- 主分类号： C03C14/00
- IPC分类号： C03C14/00 ; H01B3/08 ; H01L21/48
摘要：
A low-temperature sinterable three-component system inorganic composition having low dielectric constant, comprising alumina, quartz glass and boro-silicate glass, each ingredient of the system being on each of lines which connects each of the following composition points in a three-component system composition diagram: (X=0, Y=0, Z=100) (X=45, Y=0, Z=55) (X=0, Y=45, Z=55) wherein X represents alumina, Y represents quartz glass and Z represents boro-silicate glass (weight % ratio) and X + Y + Z = 100, and being within the composition range which is defined by the three points. The composition can be sintered at a low temperature of not more than 1000°C and can be used as a multilayer ceramic substrate on which elements of an ultra high speed VLSI are mounted.
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