发明授权
- 专利标题: MULTIMODULUS PRESSURE SENSOR
- 专利标题(中): 多模压力传感器。
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申请号: EP90901390.6申请日: 1989-12-12
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公开(公告)号: EP0451193B1公开(公告)日: 1994-07-13
- 发明人: FRICK, Roger, L. , RUD, Stanley, E., Jr.
- 申请人: ROSEMOUNT INC.
- 申请人地址: 12001 Technology Drive Eden Prairie, MN 55344 US
- 专利权人: ROSEMOUNT INC.
- 当前专利权人: ROSEMOUNT INC.
- 当前专利权人地址: 12001 Technology Drive Eden Prairie, MN 55344 US
- 代理机构: Cross, Rupert Edward Blount
- 优先权: US289207 19881223
- 国际公布: WO9007701 19900712
- 主分类号: G01L7/08
- IPC分类号: G01L7/08 ; G01L9/12
摘要:
A pressure sensor (10, 49, 140) utilizes the effect of different elastic moduli between layers (20, 21; 36, 38; 53, 54; 123, 124; 146, 147) or sections of different material that are bonded together to form a body (17, 35, 52, 122, 145), so that when the bonded material unit (17, 35, 52, 122, 145) is subjected to a uniform hydrostatic external pressure, the differences in the elastic moduli of each of the materials will cause the materials to deflect in a predictable manner proportional to pressure. The amount of warpage or deflection of the body (17, 35, 52, 122, 145) of material can be measured as a function of pressure. Specifically, two layers of materials (20, 21; 36, 38; 53, 54; 123, 124; 146, 147), such as silicon (20, 38, 54, 123-146) and borosilicate glass (21, 36, 53, 124, 147), which have substantially different elastic moduli can be bonded across an interface surface (40, 55) to form an assembly (17, 35, 52, 122, 145) and when subjected to a substantially uniform pressure on the exterior surfaces the asembly (17, 35, 52, 122, 145) will deflect for indicating applied pressure at relatively high pressure ranges. The bonded material assembly (17, 35, 52, 122, 145) is placed in a fluid to provide a substantially uniform applied hydrostatic pressure on all exposed surfaces of the bonded material assembly (17, 35, 52, 122, 145).
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