发明公开
EP0459047A1 Electron-optical system for making a pseudoparallel micro electron-beam
失效
Elektronenoptisches System zur Erzeugung eines pseudoparallelen Elektronenstrahls mit kleinem Strahlquerschnitt。
- 专利标题: Electron-optical system for making a pseudoparallel micro electron-beam
- 专利标题(中): Elektronenoptisches System zur Erzeugung eines pseudoparallelen Elektronenstrahls mit kleinem Strahlquerschnitt。
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申请号: EP90305987.1申请日: 1990-06-01
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公开(公告)号: EP0459047A1公开(公告)日: 1991-12-04
- 发明人: Hayashi, Shigeki
- 申请人: SHIMADZU CORPORATION
- 申请人地址: 1 Kuwabara-cho Nishinokyo Nakakyo-ku Kyoto 604 JP
- 专利权人: SHIMADZU CORPORATION
- 当前专利权人: SHIMADZU CORPORATION
- 当前专利权人地址: 1 Kuwabara-cho Nishinokyo Nakakyo-ku Kyoto 604 JP
- 代理机构: Smith, Philip Antony
- 主分类号: H01J37/141
- IPC分类号: H01J37/141 ; H01J37/04 ; H01J37/28
摘要:
An electron-optical system devised so as to generate a pseudoeparallel micro electron-beam coverging at a converging angle of 1 x 10⁻³ radian. The system comprises a condenser lens assembly (3, 4) and an asymmetric objective lens (6) whose smaller field gradient side is directed to the condenser lens assembly (3, 4). In another electron-optical system achieved by modifying the above system, the converging angle of the electron beam is made variable with an additional objective lens (8) inserted between the condenser lens assembly (3, 4) and the asymmetric objective lens (6). Theconversion angle can be varied by varying the conversion powers of both the objective lenses (6, 8).
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