发明授权
EP0504796B1 Method for surface treatment of a body, surface treatment agent, surface treated body, surface treated members, and apparatus being furnished with same
失效
用于处理体的表面处理的装置,用于表面处理,表面处理的身体,Oberlfächebehandelte份,和含有该装置
- 专利标题: Method for surface treatment of a body, surface treatment agent, surface treated body, surface treated members, and apparatus being furnished with same
- 专利标题(中): 用于处理体的表面处理的装置,用于表面处理,表面处理的身体,Oberlfächebehandelte份,和含有该装置
-
申请号: EP92104577.9申请日: 1992-03-17
-
公开(公告)号: EP0504796B1公开(公告)日: 1996-09-18
- 发明人: Nakakawaji, Takayuki , Morihara, Atsushi , Shoji, Mitsuyoshi , Sato, Koji , Ito, Yutaka , Kaji, Ryuichi , Go, Hiroshi
- 申请人: HITACHI, LTD.
- 申请人地址: 6, Kanda Surugadai 4-chome Chiyoda-ku, Tokyo 101 JP
- 专利权人: HITACHI, LTD.
- 当前专利权人: HITACHI, LTD.
- 当前专利权人地址: 6, Kanda Surugadai 4-chome Chiyoda-ku, Tokyo 101 JP
- 代理机构: Beetz & Partner Patentanwälte
- 优先权: JP54342/91 19910319
- 主分类号: C09K3/18
- IPC分类号: C09K3/18 ; C08G65/32 ; H01L23/373
公开/授权文献
信息查询