发明公开
EP0518112A1 A process for fabricating micromachines
失效
Verfahren zur Herstellung von Micromaschinen。
- 专利标题： A process for fabricating micromachines
- 专利标题（中）： Verfahren zur Herstellung von Micromaschinen。
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申请号： EP92108797.9申请日： 1992-05-25
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公开(公告)号： EP0518112A1公开(公告)日： 1992-12-16
- 发明人: Ueda, Minoru, c/o Osaka Works of Sumitomo , Iiyama, Michitomo, c/o Osaka Works of Sumitomo
- 申请人： SUMITOMO ELECTRIC INDUSTRIES, LTD.
- 申请人地址： 5-33, Kitahama 4-chome, Chuo-ku Osaka-shi, Osaka 541 JP
- 专利权人： SUMITOMO ELECTRIC INDUSTRIES, LTD.
- 当前专利权人： SUMITOMO ELECTRIC INDUSTRIES, LTD.
- 当前专利权人地址： 5-33, Kitahama 4-chome, Chuo-ku Osaka-shi, Osaka 541 JP
- 代理机构： Boeters, Hans Dietrich, Dr.
- 优先权： JP149461/91 19910524; JP149462/91 19910524; JP149463/91 19910524
- 主分类号： C04B41/91
- IPC分类号： C04B41/91 ; C23C16/00
摘要：
A novel ceramic material for sacrificial layers used in the process for fabricating "micromachines" having dimensions of several tens micrometers to several hundreds micrometers.
The sacrificial layers are made of oxide ceramic containing rare earth, Ba and Cu such as Re₁Ba₂Cu₃O 7-x (Re = rare earth) which can be etched easily and selectively with HCl solution (1/1000) without spoiling dimensional precision of the machine elements.
The sacrificial layers are made of oxide ceramic containing rare earth, Ba and Cu such as Re₁Ba₂Cu₃O 7-x (Re = rare earth) which can be etched easily and selectively with HCl solution (1/1000) without spoiling dimensional precision of the machine elements.
公开/授权文献
- EP0518112B1 A process for fabricating micromachines 公开/授权日：1997-04-02
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