发明公开
- 专利标题： An apparatus for supplying granular raw material for a semiconductor single crystal pulling apparatus
- 专利标题（中）： 一种用于为一个半导电的晶体拉伸装置供给粒状散料。
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申请号： EP92309332.2申请日： 1992-10-14
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公开(公告)号： EP0537988A1公开(公告)日： 1993-04-21
- 发明人: Takano, Kiyotaka , Fusegawa, Izumi , Yamagishi, Hirotoshi , Mizuishi, Koji , Ogino, Katsuhiko
- 申请人： SHIN-ETSU HANDOTAI COMPANY LIMITED
- 申请人地址： 4-2, Marunouchi 1-Chome Chiyoda-ku Tokyo JP
- 专利权人： SHIN-ETSU HANDOTAI COMPANY LIMITED
- 当前专利权人： SHIN-ETSU HANDOTAI COMPANY LIMITED
- 当前专利权人地址： 4-2, Marunouchi 1-Chome Chiyoda-ku Tokyo JP
- 代理机构： Pacitti, Pierpaolo A.M.E.
- 优先权： JP293808/91 19911015
- 主分类号： C30B15/02
- IPC分类号： C30B15/02
摘要：
An apparatus for continuously supplying granular polycrystal silicon to a crucible of a semiconductor single crystal pulling apparatus, comprising a funnel-shaped tank having a relatively large capacity, a main hopper having a relatively small capacity and weight, a subhopper having an intermediate capacity and weight and providing a passage from said tank to said main hopper, and a weight sensor for detecting the weight of the main hopper, wherein the overall weight of the main hopper is measured to obtain the flow rate (supply rate) of the granular polycrystal silicon.
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