发明授权
- 专利标题: MICROMECHANICAL TUNING FORK ANGULAR RATE SENSOR
- 专利标题(中): MICRO机械转速传感器后STIMMGABEL原理
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申请号: EP92919849申请日: 1992-09-11
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公开(公告)号: EP0604519B1公开(公告)日: 1997-12-29
- 发明人: GREIFF PAUL , BOXENHORN BURTON
- 申请人: DRAPER LAB CHARLES S
- 专利权人: DRAPER LAB CHARLES S
- 当前专利权人: DRAPER LAB CHARLES S
- 优先权: US75770691 1991-09-11
- 主分类号: G01C19/5719
- IPC分类号: G01C19/5719 ; G01C19/56
摘要:
A micromechanical tuning fork gyroscope includes a suspended structure (14) comprising at least first and second vibratable structures (38, 40). Each vibratable structure is energizable to vibrate laterally, within a first plane, along an axis (42) normal to the rotation sensitive axis (44). The lateral or inplane vibration of the first and second vibratable structures effects simultaneous vertical or rotational movement of at least a portion of the suspended structure upon the occurence of angular rotation of the gyroscope about the rotation sensitive axis. Vertical or rotational movement of the suspended structure is sensed by electrodes (70, 72) and a voltage proportional to the movement is generated, for providing an indication of angular rate of rotation detected by the gyroscope.
公开/授权文献
- EP0604519A4 MICROMECHANICAL TUNING FORK ANGULAR RATE SENSOR. 公开/授权日:1996-04-24
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