This invention provides a superhard film-coated material consisting of a superhard film of diamond or the like, and a superhard alloy base material to which the film is fixed firmly; and a method of producing the same. According to the present invention, a superhard alloy base material is heat treated so as to deposit hemispherically on the surface of the base material a combined metal in the portion of the base material which is close to the surface therhof. This invention is characterized in that diamond and/or diamond-like carbon is formed by a chemical vapor phase synthesis on the surface of the base material by leaving the deposited metal as it is or removing the deposited metal partially or wholly. Owing to the formation of this deposited metal, the combining force of the superhard film and superhard alloy base material increases remarkably, and the formation of a thick film becomes possible.