发明公开
EP0635873A1 Processing system and device manufacturing method using the same
失效
Behandlungsvorrichtung und deren Verwendung im Herstellungsverfahren von Bauelementen。
- 专利标题： Processing system and device manufacturing method using the same
- 专利标题（中）： Behandlungsvorrichtung und deren Verwendung im Herstellungsverfahren von Bauelementen。
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申请号： EP94305332.2申请日： 1994-07-20
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公开(公告)号： EP0635873A1公开(公告)日： 1995-01-25
- 发明人: Hasegawa, Takayuki, c/o Canon Kabushiki Kaisha , Tanaka, Yutaka, c/o Canon Kabushiki Kaisha , Fujioka, Hidehiko, c/o Canon Kabushiki Kaisha
- 申请人： CANON KABUSHIKI KAISHA
- 申请人地址： 30-2, 3-chome, Shimomaruko, Ohta-ku Tokyo JP
- 专利权人： CANON KABUSHIKI KAISHA
- 当前专利权人： CANON KABUSHIKI KAISHA
- 当前专利权人地址： 30-2, 3-chome, Shimomaruko, Ohta-ku Tokyo JP
- 代理机构： Beresford, Keith Denis Lewis
- 优先权： JP180353/93 19930721; JP180356/93 19930721; JP101006/94 19940516
- 主分类号： H01L21/00
- IPC分类号： H01L21/00
摘要：
A processing system is disclosed which includes first and second chambers, each for accommodating a processing apparatus therein, each chamber being able to be kept gas tight, a coupling member for coupling the processing apparatuses accommodated in the first and second chambers with each other, and an elastic gas tightness holding member for gas tightly sealing portions between the coupling member and the first and second chambers.
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