发明公开
- 专利标题: Method and apparatus for gas analysis
- 专利标题(中): Verfahren und Vorrichtung zur Gasanalyse。
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申请号: EP95109386.3申请日: 1991-07-23
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公开(公告)号: EP0684470A2公开(公告)日: 1995-11-29
- 发明人: Irie, Takashi , Mitsui, Yasuhiro , Mizokami, Kazuaki, Coronbia Hiyoshi Bldg.,
- 申请人: HITACHI, LTD. , HITACHI TOKYO ELECTRONICS CO., LTD.
- 申请人地址: 6, Kanda Surugadai 4-chome Chiyoda-ku, Tokyo 101 JP
- 专利权人: HITACHI, LTD.,HITACHI TOKYO ELECTRONICS CO., LTD.
- 当前专利权人: HITACHI, LTD.,HITACHI TOKYO ELECTRONICS CO., LTD.
- 当前专利权人地址: 6, Kanda Surugadai 4-chome Chiyoda-ku, Tokyo 101 JP
- 代理机构: Patentanwälte Beetz - Timpe - Siegfried Schmitt-Fumian - Mayr
- 优先权: JP194946/90 19900725
- 主分类号: G01N33/00
- IPC分类号: G01N33/00 ; G01N1/38
摘要:
The invention relates to a method and an apparatus for gas analysis, particularly for calibrating gas analysis devices with calibration gases containing very low concentrations of a liquid sample vapor at a ppb level. According to the invention, the method comprises the following steps:
- putting in the concentration of a sample gas in a calibration gas (18) into a computer system (40) to permit the system to calculate the flow rate (L3) of a zero gas (20) to be mixed with sample gas,
- supplying the zero gas (20) from a zero gas source (19) to a main tube (12),
- supplying the sample gas from a sample gas generating device (6) to the main tube (12) to mix the sample gas with the zero gas (20) in the main tube (12),
- controlling the flow rate of the zero gas (20) through flow control means (25) of the zero gas (20) by a set flow rate signal (43) of the calculated flow rate (L3) fed from the computer system (40) the thereby generate the calibration gas (18) to an analysis device (41), and
- feeding a data input-starting signal (46) from the computer system (40) to the analysis device (41), and feeding a data signal (47) from the analysis device (41) to the computer system (40).
- putting in the concentration of a sample gas in a calibration gas (18) into a computer system (40) to permit the system to calculate the flow rate (L3) of a zero gas (20) to be mixed with sample gas,
- supplying the zero gas (20) from a zero gas source (19) to a main tube (12),
- supplying the sample gas from a sample gas generating device (6) to the main tube (12) to mix the sample gas with the zero gas (20) in the main tube (12),
- controlling the flow rate of the zero gas (20) through flow control means (25) of the zero gas (20) by a set flow rate signal (43) of the calculated flow rate (L3) fed from the computer system (40) the thereby generate the calibration gas (18) to an analysis device (41), and
- feeding a data input-starting signal (46) from the computer system (40) to the analysis device (41), and feeding a data signal (47) from the analysis device (41) to the computer system (40).
公开/授权文献
- EP0684470A3 Method and apparatus for gas analysis 公开/授权日:1997-05-21
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