The invention relates to a micro-diaphragm pump consisting of two valve chambers, a pump chamber between them, each valve chamber being connected to the pump chamber by a channel, a pump drive and a diaphragm sealing the three chambers. The diaphragm has an inlet valve in the region of one valve chamber and an outlet valve in the region of the other. The aim of the invention is to design a pump in such a way that both valves may be fitted on the same side of the diaphragm and substantially to simplify the construction process of the pump body. For this purpose, the valves are integrated into the diaphragm and the valve component structures on the diaphragm are on the same side thereof, and a pump body containing the pump and valve chambers is made in one piece.