发明公开
- 专利标题： Fluid control apparatus
- 专利标题（中）： 流体管理设备
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申请号： EP96110514申请日： 1996-06-28
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公开(公告)号： EP0751301A3公开(公告)日： 1998-07-15
- 发明人: OHMI TADAHIRO , HIRAO KEIJI , YAMAJI MICHIO , ITOI SHIGERU , SHINOHARA TSUTOMU , IKEDA NOBUKAZU , KOJIMA TETSUYA
- 申请人： OHMI TADAHIRO , FUJIKIN KK
- 专利权人： OHMI TADAHIRO,FUJIKIN KK
- 当前专利权人： OHMI TADAHIRO,FUJIKIN KK
- 优先权： JP16490295 1995-06-30
- 主分类号： G05D7/06
- IPC分类号： G05D7/06 ; F15B13/00 ; F15B13/08 ; G05D16/20
摘要：
A fluid control apparatus (1) comprises a mass flow controller (2), two on-off valves (3,4) disposed at the inlet side of the controller and three on-off valves (5,6,7) disposed at the outlet side of the controller. At the inlet side, a main fluid on-off valve (4) is positioned on a purge fluid on-off valve (3), and at the outlet side, a vent on-off valve (6) is positioned on a vacuum suction on-off valve (5), with a main passage on-off valve (7) further positioned on the vent on-off valve (6).
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