发明公开
EP0764990A1 Pyroelectric infrared detector and method of fabricating the same
失效
Pyroelektrischer infraroter Detektor und dessen Herstellungsverfahren
- 专利标题： Pyroelectric infrared detector and method of fabricating the same
- 专利标题（中）： Pyroelektrischer infraroter Detektor und dessen Herstellungsverfahren
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申请号： EP96118634.3申请日： 1993-10-20
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公开(公告)号： EP0764990A1公开(公告)日： 1997-03-26
- 发明人: Fujii, Satoru , Takayama, Ryoichi , Tomita, Yoshihiro , Okano, Masayuki , Torii, Hideo
- 申请人： MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.
- 申请人地址： 1006, Oaza Kadoma Kadoma-shi, Osaka 571 JP
- 专利权人： MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.
- 当前专利权人： MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.
- 当前专利权人地址： 1006, Oaza Kadoma Kadoma-shi, Osaka 571 JP
- 代理机构： Tiedtke, Harro, Dipl.-Ing.
- 优先权： JP294811/92 19921104; JP51944/93 19930312
- 主分类号： H01L37/02
- IPC分类号： H01L37/02
摘要：
A pyroelectric infrared detector includes a substrate having a recess. A pyroelectric portion substantially aligns with the recess. A resin film is located between the substrate and the pyroelectric portion. The recess faces the resin film. First and second electrodes are connected to first and second surfaces of the pyroelectric portion respectively. The pyroelectric portion may include a pyroelectric film of Pb x La y Ti z Zr w O 3 where atomic fractions "w", "x", "y", and "z" satisfy one of following conditions a), b), and c):
a) 0.7≦x≦1, x+y=1 , 0.925≦z≦1, w=0
b) x=1, y=0, 0.45≦z z+w=1
c) 0.75≦x x+y=1 , 0.5≦z z+w=1
a) 0.7≦x≦1, x+y=1 , 0.925≦z≦1, w=0
b) x=1, y=0, 0.45≦z z+w=1
c) 0.75≦x x+y=1 , 0.5≦z z+w=1
公开/授权文献
- EP0764990B1 Method of fabricating a pyroelectric infrared detector 公开/授权日：2002-01-30
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