Invention Publication
EP0764990A1 Pyroelectric infrared detector and method of fabricating the same
失效
Pyroelektrischer infraroter Detektor und dessen Herstellungsverfahren
- Patent Title: Pyroelectric infrared detector and method of fabricating the same
- Patent Title (中): Pyroelektrischer infraroter Detektor und dessen Herstellungsverfahren
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Application No.: EP96118634.3Application Date: 1993-10-20
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Publication No.: EP0764990A1Publication Date: 1997-03-26
- Inventor: Fujii, Satoru , Takayama, Ryoichi , Tomita, Yoshihiro , Okano, Masayuki , Torii, Hideo
- Applicant: MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.
- Applicant Address: 1006, Oaza Kadoma Kadoma-shi, Osaka 571 JP
- Assignee: MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.
- Current Assignee: MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.
- Current Assignee Address: 1006, Oaza Kadoma Kadoma-shi, Osaka 571 JP
- Agency: Tiedtke, Harro, Dipl.-Ing.
- Priority: JP294811/92 19921104; JP51944/93 19930312
- Main IPC: H01L37/02
- IPC: H01L37/02
Abstract:
A pyroelectric infrared detector includes a substrate having a recess. A pyroelectric portion substantially aligns with the recess. A resin film is located between the substrate and the pyroelectric portion. The recess faces the resin film. First and second electrodes are connected to first and second surfaces of the pyroelectric portion respectively. The pyroelectric portion may include a pyroelectric film of Pb x La y Ti z Zr w O 3 where atomic fractions "w", "x", "y", and "z" satisfy one of following conditions a), b), and c):
a) 0.7≦x≦1, x+y=1 , 0.925≦z≦1, w=0
b) x=1, y=0, 0.45≦z z+w=1
c) 0.75≦x x+y=1 , 0.5≦z z+w=1
a) 0.7≦x≦1, x+y=1 , 0.925≦z≦1, w=0
b) x=1, y=0, 0.45≦z z+w=1
c) 0.75≦x x+y=1 , 0.5≦z z+w=1
Public/Granted literature
- EP0764990B1 Method of fabricating a pyroelectric infrared detector Public/Granted day:2002-01-30
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